Dopant metrology in advanced FinFETs Research Book Chapters uri icon

Overview

Authors

  • Authorship

  • Editor

    • COLLAERT N

Edition

  • 1

Time

Date/time value

  • 2013

Identity

International Standard Book Number (ISBN) 13

  • 9789814364027

Additional Document Info

Parent Title

  • CMOS Nanoelectronics: Innovative Devices,Architectures, and Applications

Publisher

  • Pan Stanford Publishing