Spatial metrology of dopants in silicon with exact lattice site precision Journal Articles Refereed uri icon

Overview

Published in

  • Nature Nanotechnology

Time

Date/time value

  • 2016

Identity

Digital Object Identifier (DOI)

  • 10.1038/NNANO.2016.83

Additional Document Info

Parent Title

  • NATURE NANOTECHNOLOGY

Volume

  • 11

Issue

  • 9

Publisher

  • Nature Publishing Group