Reactive ion etching of waveguide structures in diamond Journal Articles Refereed uri icon

Overview

Published in

  • Diamond and Related Materials

Time

Date/time value

  • 2008

Identity

Digital Object Identifier (DOI)

  • 10.1016/j.diamond.2008.04.019

Additional Document Info

Parent Title

  • Diamond and Related Materials

Volume

  • 17

Publisher

  • Elsevier Science