Nanoscale fabrication using single-ion impacts Journal Articles Refereed uri icon

Overview

Published in

  • Smart Materials and Structures

Time

Date/time value

  • 2002

Identity

Digital Object Identifier (DOI)

  • 10.1088/0964-1726/11/5/310

Additional Document Info

Parent Title

  • SMART MATERIALS & STRUCTURES

Volume

  • 11

Issue

  • 5

Number

  • PII S0964-1726(02)52616-1

Publisher

  • Institute of Physics Publishing