Single ion implantation in the quantum computer construction project Full Written Papers Refereed uri icon

Overview

Published in

  • SPIE - International Society for Optical Engineering. Proceedings

Time

Date/time value

  • 2002

Identity

Digital Object Identifier (DOI)

  • 10.1117/12.471924

Additional Document Info

Parent Title

  • International Symposium on Smart Materials, Nano-, and Micro-Smart Systems
  • NANO- AND MICROTECHNOLOGY: MATERIALS, PROCESSES, PACKAGING, AND SYSTEMS

Volume

  • 4936

Issue

  • 9

Publisher

  • SPIE - The International Society for Optical Engineering