Damage Layers in Si vs. Ion Dose during 30 keV FIB Milling Journal Articles Refereed uri icon

Overview

Published in

  • Microscopy and Microanalysis

Time

Date/time value

  • 2009

Identity

Digital Object Identifier (DOI)

  • 10.1017/S1431927609098638

Additional Document Info

Parent Title

  • MICROSCOPY AND MICROANALYSIS

Volume

  • 15

Issue

  • 2

Publisher

  • Cambridge University Press