Single-source chemical vapor deposition of clean oriented Al2O3 thin films Journal Articles Refereed uri icon

Overview

Published in

  • Thin Solid Films

Time

Date/time value

  • 2009

Identity

Digital Object Identifier (DOI)

  • 10.1016/j.tsf.2009.05.032

Additional Document Info

Parent Title

  • Thin Solid Films

Volume

  • 517

Issue

  • 24

Publisher

  • Elsevier Science