The crystallisation of deep amorphous wells in silicon produced by ion implantation Journal Articles Refereed uri icon

Overview

Published in

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Time

Date/time value

  • 2001

Identity

Digital Object Identifier (DOI)

  • 10.1016/S0168-583X(01)00335-4

Additional Document Info

Parent Title

  • 12th International Conference on Ion Beam Modification of Materials (IBMM2000)
  • NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Volume

  • 175

Publisher

  • Elsevier Science