A crystallographic alignment method in silicon for deep, long microchannel fabrication Journal Articles Refereed uri icon

Overview

Published in

  • Journal of Micromechanics and Microengineering

Time

Date/time value

  • 2006

Identity

Digital Object Identifier (DOI)

  • 10.1088/0960-1317/16/10/034

Additional Document Info

Parent Title

  • Journal of Micromechanics and Microengineering

Volume

  • 16

Issue

  • 10

Publisher

  • Institute of Physics Publishing