Pulsed-radio frequency plasma enhanced chemical vapour deposition of low temperature silicon nitride for thin film transistors Journal Articles Refereed uri icon

Overview

Published in

  • Thin Solid Films

Time

Date/time value

  • 2012

Identity

Digital Object Identifier (DOI)

  • 10.1016/j.tsf.2012.03.010

Additional Document Info

Parent Title

  • THIN SOLID FILMS

Volume

  • 520

Issue

  • 15

Publisher

  • Elsevier Science