Iron-rich particles in heavily contaminated multicrystalline silicon wafers and their response to phosphorus gettering Journal Articles Refereed uri icon

Overview

Published in

  • Semiconductor Science and Technology

Time

Date/time value

  • 2012

Identity

Digital Object Identifier (DOI)

  • 10.1088/0268-1242/27/12/125016

Additional Document Info

Parent Title

  • Semiconductor Science and Technology

Volume

  • 27

Issue

  • 12

Number

  • 125016

Publisher

  • IOP Publishing