Solid phase epitaxial regrowth of germanium containing nanoporous structures formed by ion implantation Full Written Papers Refereed uri icon

Overview

Published in

  • AIP Conference Proceedings

Time

Date/time value

  • 2014

Identity

Digital Object Identifier (DOI)

  • 10.1063/1.4865642

Additional Document Info

Parent Title

  • 27th International Conference on Defects in Semiconductors (ICDS)
  • INTERNATIONAL CONFERENCE ON DEFECTS IN SEMICONDUCTORS 2013

Volume

  • 1583

Publisher

  • American Institute of Physics