FIB-induced damage in silicon Journal Articles Refereed uri icon

Overview

Published in

  • Journal of Microscopy - Oxford

Time

Date/time value

  • 2004

Identity

Digital Object Identifier (DOI)

  • 10.1111/j.0022-2720.2004.01327.x

Additional Document Info

Parent Title

  • JOURNAL OF MICROSCOPY
  • Meeting on Advances in Focused Ion Beam Microscopy (NanoFIB 2003)

Volume

  • 214

Issue

  • 3

Publisher

  • Blackwell Science