Kelvin-probe force microscopy defect study of ion implanted thermal oxide thin films on silicon Full Written Papers Refereed uri icon

Overview

Time

Date/time value

  • 2005

Additional Document Info

Parent Title

  • Commad 04: 2004 Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings
  • Conference on Optoelectronic and Microelectronic Materials and Devices

Publisher

  • IEEE