Single phosphorus ion implantation into prefabricated nanometre cells of silicon devices for quantum bit fabrication Journal Articles Refereed uri icon

Overview

Published in

  • Japanese Journal of Applied Physics

Time

Date/time value

  • 2003

Identity

Digital Object Identifier (DOI)

  • 10.1143/JJAP.42.4124

Additional Document Info

Parent Title

  • 15th International Microprocesses and Nanotechnology Conference
  • JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS

Volume

  • 42

Issue

  • 6B

Publisher

  • Institute of Pure and Applied Physics