Electron-Beam-Induced Carbon Contamination on Silicon: Characterization Using Raman Spectroscopy and Atomic Force Microscopy Journal Articles uri icon

Overview

Authors

  • Authorship

Published in

  • Microscopy and Microanalysis

Time

Date/time value

  • 2010

Identity

Digital Object Identifier (DOI)

  • 10.1017/S1431927609991206

Additional Document Info

Parent Title

  • MICROSCOPY AND MICROANALYSIS

Volume

  • 16

Issue

  • 1

Publisher

  • Cambridge University Press