The kinetics of dopant-enhanced solid phase epitaxy in H-free amorphous silicon layers Journal Articles uri icon

Overview

Published in

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Time

Date/time value

  • 1999

Identity

Digital Object Identifier (DOI)

  • 10.1016/S0168-583X(98)00671-5

Additional Document Info

Parent Title

  • 11th International Conference on Ion Beam Modification of Materials (IBMM98)
  • NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Volume

  • 148

Issue

  • 1-4

Publisher

  • Elsevier Science