THE EFFECT OF POSTIMPLANTATION ANNEALING ON THE MICROSTRUCTURE OF AL2O3 IMPLANTED WITH IRON AT - 185-DEGREES-C Journal Articles uri icon

Overview

Published in

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Time

Date/time value

  • 1991

Identity

Digital Object Identifier (DOI)

  • 10.1016/0168-583X(91)95791-B

Additional Document Info

Parent Title

  • 7TH INTERNATIONAL CONF ON ION BEAM MODIFICATION OF MATERIALS ( IBMM 90 )
  • NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Volume

  • 59

Issue

  • PART 2

Publisher

  • Elsevier Science