Optimisation of sample preparation and analysis conditions for atom probe tomography characterisation of low concentration surface species Journal Articles Refereed uri icon

Overview

Published in

  • Semiconductor Science and Technology

Time

Date/time value

  • 2016

Identity

Digital Object Identifier (DOI)

  • 10.1088/0268-1242/31/8/084004

Additional Document Info

Parent Title

  • SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Volume

  • 31

Issue

  • 8

Number

  • ARTN 084004

Publisher

  • IOP Publishing