An atomic layer deposition chamber for in situ x-ray diffraction and scattering analysis Journal Articles Refereed uri icon

Overview

Authors

  • Authorship

Published in

  • Review of Scientific Instruments

Time

Date/time value

  • 2014

Identity

Digital Object Identifier (DOI)

  • 10.1063/1.4876484

Additional Document Info

Parent Title

  • REVIEW OF SCIENTIFIC INSTRUMENTS

Volume

  • 85

Issue

  • 5

Number

  • ARTN 055116

Publisher

  • American Institute of Physics