Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure Journal Articles uri icon

Overview

Published in

  • Physica Status Solidi. A: Applications and Materials Science

Time

Date/time value

  • 2015

Identity

Digital Object Identifier (DOI)

  • 10.1002/pssa.201431256

Additional Document Info

Parent Title

  • PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Volume

  • 212

Issue

  • 2

Publisher

  • Wiley - V C H Verlag GmbH & Co. KGaA