TEM Study of the Damage Profiles induced by 14 keV P+ Implantation in Silicon and Germanium Journal Articles uri icon

Overview

Published in

  • Microscopy and Microanalysis

Time

Date/time value

  • 2007

Identity

Digital Object Identifier (DOI)

  • 10.1017/s1431927607078907

Additional Document Info

Parent Title

  • Microscopy and Microanalysis

Volume

  • 13

Issue

  • S02

Publisher

  • Cambridge University Press