The structure of damage layers in transmission electron microscope specimens in elemental and compound semiconductors after FIB fabrication Conference Proceedings uri icon

Overview

Time

Date/time value

  • 2001

Additional Document Info

Parent Title

  • MICROSCOPY OF SEMICONDUCTING MATERIALS 2001
  • Royal-Microscopical-Society Conference on Microscopy of Semiconducting Materials

Issue

  • 169

Publisher

  • Institute of Physics Publishing