ENCASED CANTILEVERS FOR LOW-NOISE FORCE AND MASS SENSING IN LIQUIDS Full Written Papers Refereed uri icon

Overview

Authors

  • Authorship

    • ZIEGLER D
    • KLAASSEN A
    • BAHRI D
    • CHMIELEWSKI D
    • NIEVERGELT A
    • MUGELE F
    • PROF John Sader
    • ASHBY PD

Time

Date/time value

  • 2014

Additional Document Info

Parent Title

  • 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
  • 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Publisher

  • IEEE