Structural and electrical characterisation of semiconductor materials using a nuclear microprobe Conference Proceedings uri icon

Overview

Published in

  • Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

Time

Date/time value

  • 1998

Identity

Digital Object Identifier (DOI)

  • 10.1016/S0168-583X(97)00657-5

Additional Document Info

Parent Title

  • 13th International Conference on Ion Beam Analysis (IBA-13)
  • NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Volume

  • 136

Publisher

  • Elsevier Science