The effect of post-implantation annealing on the microstructure of Al2O3 implanted with iron at - 185°C

Abstract

Analytical electron microscopy and Rutherford backscattering spectrometry have been used to investigate the effect of post-implantation annealing on the microstructure of Al2O3 implanted with iron at -185°C. By varying the implantation dose, annealing temperature, and annealing environment it has been possible to investigate the Fe2O3-Al2O3 and FeAl2O3 phase relationships. It was found that the as-implanted amorphous surface layer crystallizes according to a two-stage process. The amorphous layer first transforms to γ-Al2O3 and then epitactical regrowth of α-Al2O3 follows. The redistribution of Fe during annealing is related to the Al2O3 phase present and is dependent on the annealing enviro..