Journal article

THE EFFECT OF POSTIMPLANTATION ANNEALING ON THE MICROSTRUCTURE OF AL2O3 IMPLANTED WITH IRON AT - 185-DEGREES-C

PS SKLAD, L ROMANA, CJ MCHARGUE, CW WHITE, JC MCCALLUM

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ELSEVIER SCIENCE BV | Published : 1991