Journal article

Confining Liquids on Silicon Surfaces to Lubricate MEMS

Jonathan Y Leong, Jie Zhang, Sujeet K Sinha, Andrew Holmes, Hugh Spikes, Tom Reddyhoff

Tribology Letters | SPRINGER/PLENUM PUBLISHERS | Published : 2015


Liquid lubrication may provide a solution to the problem of high friction and wear in micro-electro-mechanical systems. Although the effectiveness of this approach has been demonstrated in laboratory-based friction tests, practical constraints prevent it from being applied in commercial devices. The main problem is how to position the lubricant on a silicon surface in order to limit spreading and evaporation. This paper describes two techniques to address this issue. First, low concentrations of additives are used to promote autophobic behaviour. Tests’ results show that certain concentrations of both multiply alkylated cyclopentane and amine additives are effective in halting the spread of ..

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University of Melbourne Researchers


Awarded by Engineering and Physical Sciences Research Council

Funding Acknowledgements

This work was partially supported by the Engineering and Physical Sciences Research Council (Grant Number: EP/L001624/1).