Method for the calibration of atomic force microscope cantilevers

Abstract

The determination of the spring constants of atomic force microscope (AFM) cantilevers is of fundamental importance to users of the AFM. In this paper, a fast and nondestructive method for the evaluation of the spring constant which relies solely on the determination of the unloaded resonant frequency of the cantilever, a knowledge of its density or mass, and its dimensions is proposed. This is in contrast to the method of Cleveland et al. [Rev. Sci. Instrum. 64, 403 (1993)], which requires the attachment of masses to the cantilever in the determination of the spring constant. A number of factors which can influence the resonant frequency are examined, in particular (i) gold coating, which c..