Journal article

HIGH-RESOLUTION TECHNIQUES USING SCANNING PROTON MICROPROBE (SPM)

M CHOLEWA, A SAINT, S PRAWER, JS LAIRD, GJF LEGGE, RA BARDOS, GF MOORHEAD, GN TAYLOR, SA STUART, J HOWARD

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | ELSEVIER SCIENCE BV | Published : 1994

Abstract

The very high resolution (down to 50 nm) achieved with low beam currents (fA) in a scanning ion microprobe have lead to many nondestructive techniques of microanalysis. This paper discusses recent developments and applications in the use of 3-D STIM (scanning transmission ion microscopy) Tomography, channeling STIM and IBIC (ion beam induced charge). © 1994.