Journal article

Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows

Afaq H Piracha, Patrik Rath, Kumaravelu Ganesan, Stefan Kuehn, Wolfram HP Pernice, Steven Prawer



Diamond has emerged as a promising platform for nanophotonic, optical, and quantum technologies. High-quality, single crystalline substrates of acceptable size are a prerequisite to meet the demanding requirements on low-level impurities and low absorption loss when targeting large photonic circuits. Here, we describe a scalable fabrication method for single crystal diamond membrane windows that achieves three major goals with one fabrication method: providing high quality diamond, as confirmed by Raman spectroscopy; achieving homogeneously thin membranes, enabled by ion implantation; and providing compatibility with established planar fabrication via lithography and vertical etching. On suc..

View full abstract


Awarded by Australian Research Council (ARC) Linkage project

Awarded by ARC Discovery Project

Funding Acknowledgements

A.H.P. and S.P. acknowledges funding under the Australian Research Council (ARC) Linkage project (LP100100524) and ARC Discovery Project (DP 1096288). P.R. acknowledges support by the Karlsruhe School of Optics and Photonics (KSOP) and financial support by the Deutsche Telekom Stiftung. This work was performed in part at the Melbourne Centre for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF). Devices were fabricated at the Institute of Nanotechnology (INT) and the Center for Functional Nanostructures (CFN) at Karlsruhe Institute of Technology.