Journal article

Spatial metrology of dopants in silicon with exact lattice site precision

M Usman, J Bocquel, J Salfi, B Voisin, A Tankasala, R Rahman, MY Simmons, S Rogge, LCL Hollenberg

Nature Nanotechnology | NATURE PUBLISHING GROUP | Published : 2016

Grants

Awarded by Australian Research Council Center of Excellence for Quantum Computation and Communication Technology


Awarded by US Army Research Office


Awarded by European Commission Future and Emerging Technologies Proactive Project MULTI


Funding Acknowledgements

This work is funded by the Australian Research Council Center of Excellence for Quantum Computation and Communication Technology (CE110001027) and in part by the US Army Research Office (W911NF-08-1-0527). M.Y.S. acknowledges an ARC Laureate Fellowship. This work is supported by the European Commission Future and Emerging Technologies Proactive Project MULTI (317707). Computational resources are acknowledged from NCN/Nanohub. M.U. thanks C. Hill and V. Perunicic for discussions.