High-resolution mapping of two-dimensional lattice distortions in ion-implanted crystals from X-ray diffractometry data

Abstract

The triple-crystal synchrotron X-ray diffractometry data described by Nikulin, Stevenson, Hashizume, Wilkins, Cookson, Foran & Garrett [J. Appl. Cryst. (1995), 28, 57–60] has been analyzed to map out two-dimensional (two-dimensional) lattice distortions in silicon (111) crystals implanted with B+ ions of 100 keV energy through a periodic SiO2 strip pattern. The lateral periodic structure produced a series of satellite reflections associated with the 111 Bragg peak. The 2D reconstruction incorporates the use of the Petrashen–Chukhovskii method, which retrieves the phases of the Bragg waves for these satellite reflections, together with that for the fundamental. The finite Fourier series is th..