Radiation hardness of DLC films produced by ion-assisted deposition

Abstract

DLC coatings are prepared by a novel technique in which a stream of low vapour pressure oil is condensed onto a substrate whilst simultaneously a 40 keV N+ beam impinges on the target. The films produced, are hard and wear resistant, but quite electrically conducting (1-10 ohm-cm) when compared to DLCs produced by many other methods. The modification of the electrical and structural properties of these unusual films following ion bombardment with inert (Xe) and potentially electrically active dopants (B and P) are studied, and compared with the response to ion irradiation of other DLCs and hard amorphous carbon films. In contrast with other DLCs which show a dramatic rise in conductivity upo..