Journal article
Comparison of the effect of argon and hydrogen ion bombardment on the diamond (100) surface as studied by AES and EELS
A Hoffman, PJK Paterson, S Prawer
Nuclear Inst and Methods in Physics Research B | ELSEVIER SCIENCE BV | Published : 1990
Abstract
The influence of 1.5 keV argon and hydrogen ion bombardment on the diamond (100) near-surface region is reported. Based on a comparison between the C(KLL) Auger and EEL spectra of different carbon allotropes it was possible to determine that irradiation doses of 1.6 × 1015 and 1.6 × 1016 H+2 cm2 at 1.5 keV were found to produce an amorphous surface region. By contrast Ar+ irradiation at the same dose and energy was found to induce a surface region rich in graphite-like sp2 bonds. © 1990.