COMPARISON OF THE EFFECT OF ARGON AND HYDROGEN-ION BOMBARDMENT ON THE DIAMOND-(100) SURFACE AS STUDIED BY AES AND EELS
A HOFFMAN, PJK PATERSON, S PRAWER
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | ELSEVIER SCIENCE BV | Published : 1990
The influence of 1.5 keV argon and hydrogen ion bombardment on the diamond (100) near-surface region is reported. Based on a comparison between the C(KLL) Auger and EEL spectra of different carbon allotropes it was possible to determine that irradiation doses of 1.6 × 1015 and 1.6 × 1016 H+2 cm2 at 1.5 keV were found to produce an amorphous surface region. By contrast Ar+ irradiation at the same dose and energy was found to induce a surface region rich in graphite-like sp2 bonds. © 1990.