Secondary electron emission spectroscopy and total electron yield measurements for the assessment of near-surface damage in diamond

Abstract

In this work the sensitivity of secondary electron emission (SEE) spectroscopy in the 0-50 eV range and total electron yield (TEY) for characterising the near-surface region of diamond with varying levels of damage is examined. This is accomplished by SEE and TEY measurements of diamond surfaces subjected to ever increasing doses of 1 keV Ar ion irradiation. The irradiation gradually damages, amorphises and eventually graphitises the diamond surface thus providing a continuous spectrum of different forms of carbon ranging from crystalline sp3 to amorphous sp2 bonded carbon. A strong and abrupt charging effect is observed as a function of irradiation dose. This effect was correlated with chan..