Journal article

Diamond film quality: Effects of gas phase concentrations on the Raman spectra

SJ Harris, AM Weiner, S Prawer, K Nugent

JOURNAL OF APPLIED PHYSICS | AMER INST PHYSICS | Published : 1996

Abstract

A series of diamond films have been grown, all at Tsub= 1110 K and atomic H concentrations [H]=3∓10-10 mol/cm3. The acetylene and methyl radical concentrations at the substrate surface were varied independently by factors of up to 4 and 10, respectively, by adjusting the pressure and the input methane concentration, and the effects of these variations on the Raman spectra were examined. The linewidth of the 1332 cm-1 diamond feature, the sp2 nondiamond carbon feature, and the luminescence yields all increased with increased [CH3]sub, but varying the [C2H2] had no observable impact. A quantitative relationship is provided between the sp2 content and [CH3]sub. The luminescence peak, which is t..

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