Journal article
Cathodoluminescence microanalysis of electron irradiation damage in wide band gap materials
MA Stevens Kalceff, MR Phillips, M Toth, AR Moon, DN Jamieson, JO Orwa, S Prawer
Materials Research Society Symposium Proceedings | MATERIALS RESEARCH SOCIETY | Published : 1999
DOI: 10.1557/proc-540-43
Abstract
Cathodoluminescence(CL)microanalysis(spectroscopyandmicroscopy) inanelectronmicroscopeenablesbothpre- existingandirradiationinducedlocalvariationsinthebulkandsurfacedefectstructureof widebandgapmaterialstobecharacterizedwithhighspatial(lateralanddepth) resolutionandsensitivity. CLmicroanalyticaltechniquesallowtheinsitumonitoringofelectronirradiationinducedd amage,thepostirradiationassessmentofdamageinducedbyotherenergeticradiation, andtheinvestigationofirradiationinducedelectromigrationofmobilechargeddefectspec ies.ElectronirradiatedsilicondioxidepolymorphsandMeVH +ionimplantedTypeHadiamondhavebeeninvestigatedusingCLmicroanalyticaltechnique s.©1999MaterialsResearchSociety.