Journal article

CONDUCTIVITY IN INSULATORS DUE TO IMPLANTATION OF CONDUCTING SPECIES

S PRAWER, A HOFFMAN, M PETRAVIC, R KALISH

JOURNAL OF APPLIED PHYSICS | AMER INST PHYSICS | Published : 1993

Abstract

Control of the surface conductivity of insulators can be accomplished by high dose ion implantation of conductive species. The use of C+ as the implant species is particularly interesting because C can either form electrically insulating sp3 bonds or electrically conducting sp 2 bonds. In the present work, fused quartz plates have been irradiated with 100 keV C+ ions to doses up to 1×10 17 ions/cm2 at room temperature and at 200°C. The ion beam induced conductivity was monitored in situ and was found to increase by up to 8 orders of magnitude for the ion dose range studied. Xe implantations over a similar range did not induce any changes in the conductivity showing that the increase in condu..

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University of Melbourne Researchers