CONDUCTIVITY IN INSULATORS DUE TO IMPLANTATION OF CONDUCTING SPECIES

Abstract

Control of the surface conductivity of insulators can be accomplished by high dose ion implantation of conductive species. The use of C+ as the implant species is particularly interesting because C can either form electrically insulating sp3 bonds or electrically conducting sp 2 bonds. In the present work, fused quartz plates have been irradiated with 100 keV C+ ions to doses up to 1×10 17 ions/cm2 at room temperature and at 200°C. The ion beam induced conductivity was monitored in situ and was found to increase by up to 8 orders of magnitude for the ion dose range studied. Xe implantations over a similar range did not induce any changes in the conductivity showing that the increase in condu..