Artefacts in germanium transmission electron microscope specimens prepared by focused ion beam milling
PR Munroe, S Rubanov, AG Cullis (ed.), PA Midgley (ed.)
Design and Nature | IOP PUBLISHING LTD | Published : 2003
Focused ion beam millers are increasingly used to prepare transmission electron microscope (TEM) specimens from device materials. However, the gallium ion beam may create several types of artefacts in the specimen. In this paper the nature and origin of damage layers in TEM specimens prepared from germanium via FIB will be described. These layers include voids, localised crystalline areas and implanted gallium. The high density of point defects that is generated in germanium following interaction with the beam influences the formation of these defects.