Journal article

NUCLEAR MICROPROBE FOR INTEGRATED-CIRCUIT PROCESS INSPECTION

M TAKAI, R MIMURA, H SAWARAGI, R AIHARA

Scanning Microscopy | SCANNING MICROSCOPY INT | Published : 1993

University of Melbourne Researchers

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Keywords

Microscopy
Beryllium Ion
Liquid
Focused Ion Beam
Metal Ion Source
Science & Technology
Ion
Surface Analysis
Ion Scattering
Rutherford Backscattering (rbs)
Channeling
Integrated Circuit (ic)
Medium Energy
Lithium Ion
Technology
Nuclear Microprobe