An ellipsometric study of thin films on silica plates formed by alkylchlorosilylation reagents

Abstract

The hydrophobic films produced on vitreous silica plates following solution silylation with some mono-, di-, and trichloroalkylsilylation reagents have been measured using an ellipsometric technique. It is found that all treatments produce greater than monolayer surface films, with the thickest films being formed from trichloroalkylsilylating reagents. A comparison between the silylated films and an esterified film clearly shows the superiority of the latter bonded surface in terms of compositional uniformity and low thickness. © 1992.