Journal article

Deterministic doping

David N Jamieson, William IL Lawrie, Simon G Robson, Alexander M Jakob, Brett C Johnson, Jeffrey C McCallum

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | ELSEVIER SCI LTD | Published : 2017

Abstract

Emerging programs in a new field of technology that employs quantum mechanical principles in engineered devices has driven new approaches to atomic-scale fabrication. Of crucial importance is the capability to configure single atoms in silicon, diamond and other materials. These engineered materials form the foundations of quantum technology which includes the fields of quantum communication and quantum computing. Quantum technology exploits quantum superposition and entanglement in potentially scalable quantum devices. To insert donor atoms in a large-scale device methods for deterministic ion implantation have been developed. These methods potentially allow the standard techniques develope..

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Grants

Awarded by Australian Research Council Centre of Excellence for Quantum Computation and Communication Technology


Awarded by US Army Research Office


Funding Acknowledgements

This research was supported by the Australian Research Council Centre of Excellence for Quantum Computation and Communication Technology (project number CE110001027) and the US Army Research Office (grant number W911NF-08-1-0527). We acknowledge useful discussions with Thomas Schenkel, Ettore Vittone, Jan Meijer, Daniel Spemann, Kumar Ganesan, Daniel Creedon, Steven Prawer, Andrew Dzurak, Fay Hudson and Andrea Morello. We also acknowledge past members of our group for their contributions to this review especially Changyi Yang (data in Figs. 3 and 4), Andrew Alves (data in Figs. 5 and 6) and Jessica van Donkelaar (Fig. 6). We acknowledge the kind permission of Jeremy Davis and Anatoly Rosenfeld from the University of Wollongong and Dale Prokopovich from the Australian Nuclear Science and Technology Organisation for permission to use the data shown in Fig. 7.