An Energy-Efficient Miniaturized Intracranial Pressure Monitoring System

Abstract

A miniaturized pressure-sensing microsystem targeting intracranial pressure monitoring is presented. The system takes full advantage of Invensense MEMS-CMOS process to heterogeneously integrate the sensor and interface. This integration type requires no fabrication postprocessing and results in sub-pF sensor-interface parasitic interconnection capacitance Cp which is an order of magnitude smaller than previously reported Cps. Since energy efficiency is of main concern, the minimum energy consumption for maintaining a certain signal-to-noise ratio (SNR) is analytically calculated and compared for two energy-efficient sensor front ends, namely, the switched-capacitor (SC) capacitance-to-voltag..