Journal article

Graphene masks as passivation layers in the electrochemical etching of silicon

Cheng Fang, Joseph George Shapter, Nicolas Hans Voelcker, Amanda Vera Ellis

Journal of Materials Science | SPRINGER | Published : 2014

DOI: 10.1007/s10853-014-8492-9

University of Melbourne Researchers

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Keywords

Science & Technology
Water
Technology
Materials Science
Materials Science, Multidisciplinary