Journal article

Self-assembled subnanolayers as interfacial adhesion enhancers and diffusion barriers for integrated circuits

G Ramanath, G Cui, PG Ganesan, X Guo, AV Ellis, M Stukowski, K Vijayamohanan, P Doppelt, M Lane

Applied Physics Letters | AMER INST PHYSICS | Published : 2003

DOI: 10.1063/1.1591232

University of Melbourne Researchers

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Keywords

Physics
Layers
Copper
Science & Technology
Physical Sciences
Physics, Applied