Elemental mapping using proton-induced x-rays

Abstract

The use of particle-induced x-ray emission (PIXE) in conjunction with a scanning nuclear microprobe (SNM) offers one of the few microanalytical techniques capable of studies of elemental concentrations at the ppm level, with a spatial resolution of the order of 1μm. Beam scanning capabilities and advanced data treatment make it a technique of choice for quantitative two-dimensional studies of elemental distribution. Although the ultimate aim is to obtain true quantitative elemental maps, free of concentration or thickness artifacts, some compromises are necessary owing to experimental and computational restrictions. Some approaches currently used are discussed with emphasis on true elemental..