Journal article

Single crystal diamond membranes for nanoelectronics

Kerem Bray, Hiromitsu Kato, Rodolfo Previdi, Russell Sandstrom, Kumaravelu Ganesan, Masahiko Ogura, Toshiharu Makino, Satoshi Yamasaki, Andrew P Magyar, Milos Toth, Igor Aharonovich



Single crystal, nanoscale diamond membranes are highly sought after for a variety of applications including nanophotonics, nanoelectronics and quantum information science. However, so far, the availability of conductive diamond membranes has remained an unreachable goal. In this work we present a complete nanofabrication methodology for engineering high aspect ratio, electrically active single crystal diamond membranes. The membranes have large lateral directions, exceeding ∼500 × 500 μm2 and are only several hundreds of nanometers thick. We further realize vertical single crystal p-n junctions made from the diamond membranes that exhibit onset voltages of ∼10 V and a current of several mA. ..

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Awarded by Australian Research Council

Awarded by Asian Office of Aerospace Research and Development grant

Awarded by JSPS

Funding Acknowledgements

We would like to acknowledge Carlo Bradac, Amanuel Berhane and Blake Regan for useful discussions, Minh Anh Phan Nguyen for AFM measurements and John Scott for TEM measurements and analysis. Financial support from the Australian Research Council (via DP140102721, DE130100592), FEI Company, the Asian Office of Aerospace Research and Development grant FA2386-15-1-4044 is gratefully acknowledged. I. A. gratefully acknowledges the JSPS Invitation Fellowships [S16712]. This research is supported by an Australian Government Research Training Program Scholarship.