Silicon nitride/silicon oxide interlayers for solar cell passivating contacts based on PECVD amorphous silicon
Di Yan, Andres Cuevas, Yimao Wan, James Bullock
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS | WILEY-V C H VERLAG GMBH | Published : 2015
This Letter demonstrates improved passivating contacts for silicon solar cells consisting of doped silicon films together with tunnelling dielectric layers. An improvement is demonstrated by replacing the commonly used silicon oxide interfacial layer with a silicon nitride/silicon oxide double interfacial layer. The paper describes the optimization of such contacts, including doping of a PECVD intrinsic a-Si:H film by means of a thermal POCl3 diffusion process and an exploration of the effect of the refractive index of the SiNx. The n+ silicon passivating contact with SiNx /SiOx double layer achieves a better result than a single SiNx or SiOx layer, giving a recombination current parameter o..View full abstract
This work has been supported by the Australian Renewable Energy Agency (ARENA) via the Australian Centre for Advanced Photovoltaics (ACAP). Facilities at the Australian National Fabrication Facility were used for the film deposition.