Radio frequency SF6 plasma modified single-walled carbon nanotubes: Synchrotron spectroscopy and plasma characterisation studies
AJ Barlow, JS Quinton
ICONN 2010 - Proceedings of the 2010 International Conference on Nanoscience and Nanotechnology | Published : 2010
Single-Walled Carbon Nanotubes are fluorinated within a Radio-Frequency Plasma Reactor using SF6 as a source gas. To develop an understanding of how varying experimental parameters affect the plasma, and hence the resultant modification of the nanotubes, a Langmuir Probe has been employed to study the plasma system. Information about plasma densities, electron temperatures, and the plasma potential is presented and discussed. An interesting oscillatory behavior within the plasma has also been observed and studied. © 2010 IEEE.