Journal article

Spatial mapping of band bending in semiconductor devices using in situ quantum sensors

DA Broadway, N Dontschuk, A Tsai, SE Lillie, CT-K Lew, JC McCallum, BC Johnson, MW Doherty, A Stacey, LCL Hollenberg, J-P Tetienne

Nature Electronics | NATURE PUBLISHING GROUP | Published : 2018


Awarded by Australian Research Council

Funding Acknowledgements

We thank M. Barson, D. Simpson and L. Hall for useful discussions. We acknowledge support from the Australian Research Council (grants CE110001027, DE170100129, FL130100119, DP170102735). J.-P.T acknowledges support from the University of Melbourne through an Early Career Researcher Grant. D.A.B, A.T, S.E.L and C.T.-K.L are supported by an Australian Government Research Training Program Scholarship. This work was performed in part at the Melbourne Centre for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF).